M. Kujawinska
Institute of Micromechanics and Photonics, Warsaw University of Technology
m.kujawinska@mchtr.pw.edu.pl

Abstract

The lack of M(O)EMSs’ efficient characterization and testing methods and systems is identified as the main
bottlenecks in progress of their production. The recent advances in these techniques are presented with special focus
on active interefrometry and parallel on-wafer control methods based on wafer based interferometric arrays.