Four partners of the project participated in the Microoptics Conference MOC08 in Brussels, Belgium from September 25 – September 27 2008 (http://tona.vub.ac.be/moc08/). The project was represented in a poster session.

Kay Gastinger, Malgorzata Kujawinska, Odd Løvhaugen, Stephan Beer, Christophe Gorecki, Uwe Zeitner, ”SMARTIEHS - SMART INSPECTION SYSTEM FOR HIGH SPEED AND MULTIFUNCTIONAL TESTING OF MEMS AND MOEMS”

Abstract:

This paper describes the instrument concept of the EU project SMARTIEHS. A parallel inspection system for production control of Micro(Opto)ElectroMechanicalSystems (M(O)EMS) is developed. A exchangeable probing wafer, consisting of a micro-optical interferometer array, is adapted to the M(O)EMS wafer under test. A smart pixel camera array detects the interference signal.