The main specifications are:

• Interferometer matrix resolution: 10x5 (scaleable)
• Imager array resolution: 5x5,
• Imager resolution: 140x140 pixels
• Spatial resolution: 5µm,
• Field of view: 600x600µm2, Magnification: about 9x
• Measurement resolution:
• Shape (step-like objects): 2 λ (ca 1µm)
• Shape (smooth objects): λ/20 (ca.25nm)
• Deformation: λ/10 (ca.50nm)
• Resonance frequency: FWHM/2
• Min vibration amplitude: 10nm
• Interferometer pitch: 13,76mm
• Height range: 0-600µm
• Frequency range: 10kHz-1MHz
• Measurement time per 25 structures:
• shape: 1s
• deformation: 2s
• resonance frequency: 2s/100f 

 For comments or questions regarding the SMARTIEHS specifications please contact us.